抄録
Automobile emission control has been regulated severely for preserve earth environment. The role of the sensor used in the engine regulating system becomes increasingly important and high reliability and highly precision are demanded. Especially, the air flow sensor which measures air flux is important to perform precise combustion in engine.
First of all, the air flux measurement technologies of an automobile engine, and the subjects and countermeasures of a hot wire air flow sensor are described. Next, the development examples of an air flow sensor where utilized MEMS (Micro-Electro-Mechanical System) and DSP(digital-signal-processing) technology for improvements of measurement accuracy and reliability with the miniaturized design are described.