電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks
Takeshi HatsuzawaHisashi HamanoMasashi SaitoYasuko Yanagida
著者情報
ジャーナル フリー

2007 年 127 巻 1 号 p. 37-41

詳細
抄録
Surface polishing is required for small crystal blanks to eliminate frequency spurious generated by the infinite rectangular shape. From the productivity viewpoint, bi-convex or plano-cylindrical surface are generally used to realize the energy trapping at the central part of the blanks. So far barrel polishing is the common fabrication technology to obtain bi-convex surface, however, the surface is finished insufficiently and fabrication process takes longer time as the blank size becomes small. To solve this difficulty, two types of new surface micro-polishing mechanisms with fixed abrasive and arrayed blank arrangement are experimentally examined to obtain plano-cylindrical surface. The fastest finishing time of 10 s for a blank is achieved together with the spurious elimination.
著者関連情報
© 2007 by the Institute of Electrical Engineers of Japan
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