抄録
This paper deals with a pyrolyzed polymer as a kind of carbon materials obtained by pyrolysis of polymers. Through a combination of micromachining of polymers and following pyrolysis process, we can obtain pyrolyzed polymer MEMS structures for various applications. This work focuses on the effect of NO2 gas adsorption on electrical properties of pyrolyzed polymers. The resistance of the sensor is dramatically decreased when the sensor is exposed to the NO2 gas. It is found that low pyrolysis temperature and high operating temperature contribute to higher sensitivity against gas mixture of NO2.
