Design and Fabrication of a Thin-Film Silicon Photodetector with Angular Sensitivity for Optical Micro-Encoder

抄録

In this paper, we describe a directional thin-film silicon photodetector with the objective of optical micro-encoder application. A directional photodetector with high absorption efficiency at a specific angle of incident light is based on guided-mode resonance (GMR) of subwavelength grating. The sensitive direction is tunable by changing the grating period. Numerical analysis, fabrication and device performance are presented.