2009 年 129 巻 10 号 p. 321-327
This paper describes a high-speed CMOS image sensor with a new type of global electronic shutter pixel. A global electronic shutter is necessary for imaging fast-moving objects without motion blur or distortion. The proposed pixel has two potential wells with pinned diode structure for two-stage charge transfer that enables a global electronic shuttering and reset noise canceling.
A prototype high-speed image sensor fabricated in 0.18μm standard CMOS image sensor process consists of the proposed pixel array, 12-bit column-parallel cyclic ADC arrays and 192-channel digital outputs. The sensor achieves a good linearity at low-light intensity, demonstrating the perfect charge transfer between two pinned diodes. The input referred noise of the proposed pixel is measured to be 6.3 e-.
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