抄録
A simple asymmetric micro-mirror excited by an external piezoelectric ceramic vibrating element was shown to be effective for scanning an optical beam and was applied to a glasses-like retinal display. Using an SOI (Silicon on Insulator) wafer simplifies the fabrication process and results in a very flat mirror surface. A structure consisting of two such mirrors (one horizontal and one vertical) was used to reproduce images with half VGA resolution. The space and power effectiveness of this silicon micro-mirror optical-beam scanner was demonstrated in a super-small wearable micro-mirror display device, which has a glasses-like optical imaging system.
