抄録
The Mems-ONE is well known software which simulates thermo-viscoelastic properties in the conduct of nanoimprinting. Assuming the glass materials to be viscoelastic body, the relaxation shear modulus was measured by the creep test, Williams-Landel-Ferry (WLF) equation is applied for expressing the temperature dependence of liquid viscosity. We compared experimental with analytic results used by Mems-ONE with the condition of fixed pressure and time. Thermo-viscoelastic properties of the glass materials were estimated using unidirectional compression creep test based on traditional thermo viscoelastic theory. Glass was Borosilicate Glass (D263, Schott). Glass imprinting was carried out on Glassy Carbon (GC) mold with line & space10 μm patterns fabricated by dicing saw. The machining accuracy is most important thing as the evaluation mold. The glass imprinting temperature consulted thermo-viscoelastic properties of the glass materials. The numerical simulation was carried out on the small portion of mold and glass. The constant value of WLF equation fitting in high temperature translates the master curve of D263 with a high degree of accuracy. It caused the accuracy improvement of analysis result. In addition, we confirm that WLF equation intended to resin can use to the glass imprinting.
