We developed vacuum-packaging equipment and low-cost vacuum packaging technology for IRFPAs. The equipment is versatile and can process packages with various materials and structures. Getters are activated before vacuum packaging, and we can solder caps/ceramic-packages and caps/windows in a high-vacuum condition using this equipment. We also developed a micro-vacuum gauge to measure pressure in vacuum packages. The micro-vacuum gauge uses the principle of thermal conduction of gases. We use a multi-ceramic package that consists of six packages fabricated on a ceramic sheet, and confirm that the pressure in the processed packages is sufficiently low for high-performance IRFPA.
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