抄録
In this paper, we report the structure and the fabrication process of the new Micro-Electro-Mechanical Systems (MEMS) Fabry-Perot Tunable Filter (FPTF) device with Ag alloy mirror which is tunable in the wide wavelength range of visible light. The device has very simple structure, which consists of two substrates that are bonded by using novel bonding technology, polymer films, and inert gas plasma treatments. We confirmed that the wavelength of the 1st order transmission peak of fabricated device can be adjusted to a 400-700nm range by applying the different DC voltage. Our MEMS FPTF device successfully operates in the wide wavelength range of visible light, shows good agreement with simulation result.
