マイクロカンチレバーアレイを用いたフレキシブルデバイス用接点構造の特性評価

抄録

Conductive polymer coated micro-cantilever array made by reel-to-reel continuous fiber process as the electrical contact components for woven electronic textile was investigated. We report the novel cantilever releasing method using air injection and the results of patternable CYTOP and organic conductive polymer using nanoimprinting method. The conductive organic material used in this study is PEDOT:PSS (poly(3,4-ethylenedioxythiophene) poly(4-styrenesulfonate)). Micro-cantilever contact array is realized to compose the electrical circuit through the large area woven textile. The contact resistance of 480 Ω is hold on for over 500 times. Contact resistance measurements revealed that an electric current begins to flow with smaller contact force for PEDOT:PSS coated cantilever array structure than for PEDOT:PSS film structure. There is no appreciable wear on cantilever surface due to its movability after 10³ cycles contact test with 0.5 N contact force. Based on these results, PEDOT:PSS coated micro-cantilever array have excellent potential as electrical contact components between weft and warp for woven electronic textile.