論文
U字形及びI字形のSOI-MUMPsによる片持ち梁構成の熱式マイクロアクチュエータ
2012 年 132 巻 5 号 p. 103-107
詳細
2012 年 132 巻 5 号 p. 103-107
Recently, the micro fluid systems have been extensively studied, where microactuators such as micro valves fabricated by MEMS technology are essential for realizing these systems. In this paper thermal microactuators with U-type and I-type shapes fabricated by SOI-MUMPs technology have been investigated for optimizing their configurations.
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