Power-Regulated Thermal Actuator Based on UV-Patterned Polyimides for a Ciliary Motion System

抄録

We have been conducting autonomous distributed MEMS research since the early 1990s. We are now working on an international project involving a new concept based on a self-movable and self-reconfigurable micro-conveyor utilizing ciliary-type micro-actuators arranged in an array over a large surface. The fabrication of the ciliary motion system (CMS) has been successfully simplified using photosensitive polyimides patterned by a direct UV lithography technique. The characteristics of the new device are equivalent to those of the previous devices made by classical methods, including plasma ashing. We also propose an integrated CMOS circuit to accurately regulate the input power of the thermal actuators while preventing overheating.