Abstract
A measurement method of surface texture of objects using active touching of a tactile sensor which has inclined micro-cantilevers with strain gauge film on Si has been reviewed. The fabricated tactile sensors have an ability of detecting roughness of more than ∼20μm, and they can detect striped pattern on the Japanese banknote. Various kinds of blank paper which have different properties including hardness, friction coefficient, and surface roughness were identified using output from the fabricated tactile sensor. The feature quantities which depend on paper properties were defined from the resistance change by pushing, moving, and stopping of the sensor. The papers were classified in four clusters by principal component analysis of defined feature quantities.
