We introduced groove structures in between the flow- and temperature-sensors to avoid the heat flow to the temperature sensor from the heater used as the flow sensing. The grooves were produced by oxygen plasma etching, and thermal isolation effect by those was confirmed by an infrared thermography. The relationships between the flow rate and the flow sensor output with and without temperature compensation were evaluated. We finally confirmed that the variations of the flow sensor output by the change of the fluid temperature were successfully compensated by the temperature sensor.
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