巻号一覧
134 巻, 6 号
選択された号の論文の13件中1～13を表示しています
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特集：第30回「センサ・マイクロマシンと応用システム」シンポジウム受賞論文特集
巻頭言
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前中 一介2014 年 134 巻 6 号 p. 125
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリー
特集論文
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松山 拓矢, 山﨑 雄大, 松島 充代子, 川部 勤, 式田 光宏2014 年 134 巻 6 号 p. 126-131
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーWe introduced groove structures in between the flow- and temperature-sensors to avoid the heat flow to the temperature sensor from the heater used as the flow sensing. The grooves were produced by oxygen plasma etching, and thermal isolation effect by those was confirmed by an infrared thermography. The relationships between the flow rate and the flow sensor output with and without temperature compensation were evaluated. We finally confirmed that the variations of the flow sensor output by the change of the fluid temperature were successfully compensated by the temperature sensor.抄録全体を表示PDF形式でダウンロード (3145K) -
丹羽 英二, 白川 究, 新行内 成晃, 熊 四輩, 中原 健司, 伊東 孝道, 佐々木 祥弘2014 年 134 巻 6 号 p. 132-139
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーA Cr-N thin film shows a gauge factor of about 16 and a temperature coefficient of resistivity (TCR) of about zero, which is expected as a new strain gauge material in the next generation. In this paper, the fabrication and characterization of a single module system of the load vector sensor using the Cr-N strain sensitive thin films, which can be applied for a sole sensor, are reported.抄録全体を表示PDF形式でダウンロード (1491K) -
松木 薫, 高橋 雅矢, 森島 哲矢2014 年 134 巻 6 号 p. 140-145
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーThe micro inertial drive actuator, which can move two sliders independently, at 2.5 mm in width, 2 mm in height, and 20 mm in length was made as an experiment, and the basic characteristic was evaluated. As a result, we confirmed the movement speed of about 35 mm/s (drive frequency of 16 kHz) in the applied voltage of 80 V. In addition, we indicated that the position detection of the slider by a built-in sensor was possible, and achieved the position accuracy of ± 20 µm by using the control system with the build-in sensor.抄録全体を表示PDF形式でダウンロード (982K) -
西野 仁, 吉田 慎哉, 小島 明, 池上 尚克, 田中 秀治, 越田 信義, 江刺 正喜2014 年 134 巻 6 号 p. 146-153
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーThis paper reports on the fundamental process development of a Pierce-type nanocrystalline Si (nc-Si) electron emitter array for massively parallel electron beam (EB) lithography based on active-matrix operation using a large-scaled integrated circuit (LSI). The emitter array consists of 100×100 hemispherical emitters formed by isotropic wet etching of Si. EB resist patterning was demonstrated by 1:1 projection exposure using a discrete emitter array at CMOS-compatible operation voltages. Isolation trenches filled with benzocyclobutene (BCB) were fabricated in the Si substrate for independent control of each emitter using the LSI. The integration process of the emitter array, the LSI and an extraction electrode plate was also developed based on Au-In and polymer bonding technologies.抄録全体を表示PDF形式でダウンロード (2143K) -
齋藤 卓弥, 川合 祐輔, 小野 崇人2014 年 134 巻 6 号 p. 154-158
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーA novel pyro/piezo-electric energy converter, which is based on pyroelectric and piezoelectric energy conversion caused by periodic temperature and pressure change of a ferroelectric material, is developed. A bulk lead-zirconate-titanate (PZT) ceramic is attached on a bimetal disk. This bimetal disk is placed between hot and cold sources, which causes reciprocatory motion between the hot and cold sources. The temperature of the PZT ceramic is periodically changed due to the heat transfer, which produces pyroelectric current. At the moment of the forward and reverse buckling, piezoelectric current due to deformation of PZT ceramic is also caused. Maximum output power of 2.1 nW is obtained with the reciprocation frequency of 1.6 Hz when temperature difference is 258°C. This converter can be driven at hot source temperature higher than Curie point of PZT ∼330°C.抄録全体を表示PDF形式でダウンロード (804K) -
日暮 栄治, 須賀 唯知2014 年 134 巻 6 号 p. 159-165
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーLow-temperature bonding is an important fabrication technique for advanced microelectronic, MEMS (Micro electro mechanical systems) and optoelectronic devices. Recently, many low-temperature bonding methods such as surface activated bonding have been studied to create unique device structures for a wide range of photonics applications. This paper focuses on low temperature bonding technologies and reviews the state-of-the-art applications in optoelectronic devices.抄録全体を表示PDF形式でダウンロード (2221K)
特集研究開発レター
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Yong-Jun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono2014 年 134 巻 6 号 p. 166-167
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーSilicon nanowires have attracted considerable attention due to their excellent mechanical and electrical properties and widely investigated for various applications. One of the exciting applications is magnetic resonance force microscopy (MRFM), which requires a high sensitive probe for three-dimensional imaging of spin densities. In this study, we have fabricated a 160 nm-wide and 52 µm-long Si nanowire probe with a Si mirror and Ni magnet from a silicon-on-insulator wafer. The nanowire is suitable structure as the probe for a detection of MRFM. The probe shows a resonance frequency of 8.007 kHz and a Q factor of approximately 5000. Two-dimensional force mapping based on electron spin resonance has been demonstrated using the fabricated nanowire probe.抄録全体を表示PDF形式でダウンロード (967K)
部門記事
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グェン ビン キェム2014 年 134 巻 6 号 p. NL6_1
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーPDF形式でダウンロード (705K) -
遠藤 達郎2014 年 134 巻 6 号 p. NL6_2
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーPDF形式でダウンロード (594K) -
前中 一介, 峯田 貴, 石川 智弘, 村上 裕二2014 年 134 巻 6 号 p. NL6_3-NL6_8
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーPDF形式でダウンロード (1097K) -
2014 年 134 巻 6 号 p. NL6_9
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーPDF形式でダウンロード (207K)
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2014 年 134 巻 6 号 p. L6_1
発行日: 2014年
公開日: 2014/06/01
ジャーナル フリーPDF形式でダウンロード (134K)
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