抄録
The micro inertial drive actuator, which can move two sliders independently, at 2.5 mm in width, 2 mm in height, and 20 mm in length was made as an experiment, and the basic characteristic was evaluated. As a result, we confirmed the movement speed of about 35 mm/s (drive frequency of 16 kHz) in the applied voltage of 80 V. In addition, we indicated that the position detection of the slider by a built-in sensor was possible, and achieved the position accuracy of ± 20 µm by using the control system with the build-in sensor.
