抄録
Thermal infrared focal plane arrays and small-format infrared array sensors are attracting much attention for extending our sense of sight. These infrared sensors are manufactured with the MEMS (Microelectromechanical Systems) technology, which is a powerful method to fabricate high thermal isolation structures. This paper reviews basics and state-of-the-art of MEMS-based infrared sensors. Business trends in the low-end infrared sensor market are also discussed.
