We have established a fabrication method of Split Ring Resonator (SRR) for optical region on a peelable polymer film and developed a stacking technique for the film with SRR. The film with SRR (SRR film) fabricated by nanosphere lithography can be separated from the glass substrate by melting a sacrificial layer formed between the SRR film and the substrate, and stacked on other substrate by scooping the SRR film floating in water. We have successfully fabricated the double-layered SRR film by the stacking technique. The experimental scattered light spectra of the double-layered SRR film possess the peak related to the LC resonance mode of the SRR. The vertical SRR to the substrate was also fabricated on a micro-size cubic on a silica substrate by the stacking technique.
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