2015 年 135 巻 11 号 p. 450-453
We propose an approach to build tunable terahertz (THz) devices by using the concept of reconfigurable metamaterials developed by surface MEMS (micro electro mechanical system) technique. The implemented metamaterial is composed of an array of unit cells based on the inductor-capacitor (LC) resonators. By using the MEMS technique to reconfigure the structure of the unit cell, thus the capacitance of the resonator, we demonstrated the tunable transmission of the metamaterial device controlled by applied voltage (around 40 V). The device can be used as a tunable THz band-stop filter and an amplitude modulator with double frequency bands. By engineering the arrayed configuration for the unit cells, we propose a method to constitute a programmable THz spatial modulator, such as a THz lens, which has wide range of applications in THz spectroscopy and THz communication.