抄録
In this paper, we present a SPICE equivalent circuit model of an electrostatic vibration energy harvester. The SPICE model consists of a generation part and a mass-spring system part considering electrostatic force. The change in capacitance between electrodes with the position of the mass is analyzed by FEM analysis and is applied for the generation part. For investigating the characteristics of the actual harvester, the harvester was fabricated and charged by a -200 V monopolar potential. The maximum output power of the monopolar-charged harvester is 1.1 µW with applied vibration amplitude of 350 µmpp at 323.3 Hz with 0.8 MΩ optimum load resistance. We confirmed that the examined and analyzed results indicate high correspondence.
