IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Special Issue Paper
Development of Low-cost Mass Production Process of Superrepellent Surface using Doubly Reentrant Structure Pillar Array
Kanki NakanishiShigeyuki MinoshiroDong Hyun YoonTetsushi SekiguchiShuichi Shoji
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2017 Volume 137 Issue 6 Pages 165-168

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Abstract

A new fabrication process of a superrepellent surface using a doubly reentrant structure pillar array was developed. The proposed process applying a soft-lithography is simple, low-cost, and mass-productive process compared to the conventional process. It enables to fabricate a doubly reentrant structure pillar array on glass, silicon, and PDMS substrates.

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© 2017 by the Institute of Electrical Engineers of Japan
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