電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
Pt触媒を用いたWO3系多層薄膜NH3ガスセンサの研究
森田 翼佐野 晃司山口 富治原 和裕
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2018 年 138 巻 10 号 p. 471-476

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NH3 gas is a poisonous substance that adversely affects the environment and humans. A low level NH3 is created by human bodies and emitted as a component of urine and exhaled breath. Therefore, the detection of NH3 gas is important to monitor human health conditions. A novel WO3 multiple-layered thin film NH3 sensor using Pt catalyst has been developed in this study. WO3 thin film coated with Pt nanoparticles successfully improves the sensitivity to NH3 gas. Furthermore, WO3 multiple-layered thin film with an interspace has the effect of enhancing the sensitivity and lowering the optimum operating temperature. The developed sensor can detect as low as 1 ppm NH3 gas.

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