This paper describes MEMS pressure sensor that can be fabricated simultaneously with MEMS micro-heater. The pressure sensor has a thin-film diaphragm consisting of SiO2/Si3N4 films and a metal strain gauge on the diaphragm. The pressure sensor rectifies nonlinear pressure characteristic due to large deflection of diaphragm by combining bending strain and elongation strain. Absolute pressure sensor using the diaphragm shows good temperature characteristics of ±4% or less for temperature range -40℃∼+80℃, absolute pressure range 50kPa∼300kPa without any temperature compensations.
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