The authors investigated the thermal stability of thin film strain sensors. As a result, it was found that Cr-Al and Cr-B binary thin film alloys are thermally stable in a wide temperature range of high temperature. Thermal coefficient of Gf (TCS) and thermal coefficient of resistivity (TCR) show zero at Cr-14.5at.%Al thin film alloy prepared on the glass substrate. In addition, we have found a new Cr-Al contain 3∼5at.%B ternary thin film strain sensor. These alloys prepared on glass and Fe base substrates showed TCS and TCR becomes zero at same composition. These Cr-Al-B ternary thin film alloys are thermally stable at high temperature, and TCS=TCR=0 can be expected for the various equipment.
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