2020 年 140 巻 11 号 p. 305-308
A solid-state micro NOX sensor was tried to make using a solid-electrolyte Li1.5Al0.5Ti1.5(PO4)3 (LATP) thin-film as an impedance transducer and a perovskite-type oxide thin-film as a receptor, respectively. The LATP and perovskite-type La0.8K0.2MnO3 oxide thin-films were prepared by wet-chemical methods at 650-800°C. The La0.8K0.2MnO3/LATP thin-film device could work as a good impedancemetric NO2 sensor at 300-500°C.
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