結晶Se薄膜マイクロフォトダイオードを用いたフィルム型フレキシブル光センサの作製とその応用

抄録

In this paper, Ga₂O₃/Se heterojunction photodiodes at a thickness of less than 1 µm are patterned on a transparent polyimide film. Photodiode patterns enabled simultaneous and multi detection of light intensity. Tiny, light- weight, and flexible features of the developed sensors are also attractive for practical applications such as sensors for wearable and/or robotics systems. Above-mentioned sensors can be attached onto even non-flat surfaces of human finger and/or movable parts of robotic systems. The details of film growth processes and patterning of Ga₂O₃/Se photodiodes on a polyimide film are also discussed.