電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
Pt超薄膜型水素センサの駆動電流の最適化による風の外乱影響低減
合田 悠斗小部 寛斗堺 健司紀和 利彦近藤 健二高橋 琢哉上田 尚宏塚田 啓二
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2020 年 140 巻 4 号 p. 92-96

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Hydrogen gas poses risks of gas leakage and explosion because the size of hydrogen molecule is very small, and its wide range of inflammability (4-75% in air). Therefore, a high-performance hydrogen sensor is indispensable for the widespread safe use of hydrogen energy. In this study, environmental resistance is improved by optimizing the current drive method of Pt ultra-thin film hydrogen sensor. The sensor output was stable even if the gas flow around the sensor changed by driving at the low current (1 mA). In addition, the sensitivity was sufficient under low current drive.

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