2020 年 140 巻 4 号 p. 92-96
Hydrogen gas poses risks of gas leakage and explosion because the size of hydrogen molecule is very small, and its wide range of inflammability (4-75% in air). Therefore, a high-performance hydrogen sensor is indispensable for the widespread safe use of hydrogen energy. In this study, environmental resistance is improved by optimizing the current drive method of Pt ultra-thin film hydrogen sensor. The sensor output was stable even if the gas flow around the sensor changed by driving at the low current (1 mA). In addition, the sensitivity was sufficient under low current drive.
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