可変3DキラルTHzメタマテリアルのための機械的変形方法の研究

抄録

This paper reports an actuation method of MEMS chiral metamaterial that transforms a two-dimensional MEMS spiral with diameter 150 µm to a three-dimensional spiral by individually pulling the center of spirals. The spiral dimension was designed to work in THz electromagnetic frequency. MEMS spirals were manufactured by bonding the central part of spirals and a Si wafer with Parylene bonding, and were deformed by lifting the Si wafer. It was confirmed that spirals were stably pulled by amplitude of 60 µm at the maximum by relatively separating the spiral and the Si wafer.