特集研究開発レター
ゴムストレッチ基板とコルゲーションマシーンを用いた高伸縮性微小縦波構造銅配線の作製
2020 年 140 巻 7 号 p. 186-187
詳細
2020 年 140 巻 7 号 p. 186-187
We have developed a new fabrication method of stretchable interconnects using a micro-corrugation machine and a pre-stretched silicone rubber substrate. The fabricated interconnects exhibited >200% stretchability, and their electric resistance was lower than 1 Ω/cm even under the stretch condition. Finally, the stretchable LED circuit with our micro wavy Cu interconnects was demonstrated.
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