ガラスの温冷感評価のためのヒータ集積型MEMS触覚センサの作製

抄録

The paper addresses fabrication and characterization of a MEMS tactile sensor sensitive to force and temperature with an on-chip heater and a contact part of thermally conductive elastomer. The temperature response of this sensor due to heat transfer when it was in contact with the glass plate was measured. As a result, it is demonstrated that fabricated sensor can detect thermally difference due to differences in the surface treatment of the glass.