可変焦点モアレメタレンズのためのMEMS回転駆動機構の製作および評価

抄録

Variable-focus lenses need to be thinner. Metalenses, which are ultra-thin lenses, are attracting attention because they can achieve variable focal lengths by rotating two lenses relative to each other and integrating them with thin actuators to realize thin varifocal metalenses. We have fabricated a MEMS rotation stage composed of a comb-drive actuator and a meander structure spring and confirmed light focusing by the electromagnetic simulation of the lens.