電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
研究開発レター
Low Elastic Torsional Resonator Supported by a Thin Metallic Glass Beam
Masaya Toda
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2024 年 144 巻 1 号 p. 23-24

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An ultrasensitive torsional sensor that responds to changes in the quantum spin states of a sample was developed. The beam was fabricated using metallic glass to support the sensor stage and achieve high sensitivity. An experiment was conducted by applying a magnetic field to a magnetic sample mounted on the device stage. By changing the magnetic field at 0.6 mT, torsional movement was observed for the device with NiFe sample placed on the stage, which generated a rotational torque and torsional displacement of 19.6 µm. The validity of the torque was examined by comparing it with theoretical values to eliminate any magnetic moment on the stage.

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© 2024 by the Institute of Electrical Engineers of Japan
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