Periodical tartar removal in canine is generally performed under general anesthesia to restrain its movement. A tracheal intubation tube is usually attached to the canine to allow immediate support in the case of emergency. To support such a procedure, here we propose a micro-machined flow sensor to be embedded in animal's tracheal intubation tube for respiration monitoring. A tube thermal flow sensor based on a two-layer tube structure with a built-in film sensor was embedded inside the intubation tube where steady flow was confirmed through fluid dynamics simulation. The respiration and heartbeat monitoring using the developed device was successfully demonstrated in an animal experiment using a rat.
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