解説
ピエゾ抵抗式半導体圧力センサ開発の道のり
2024 年 144 巻 2 号 p. 25-29
詳細
2024 年 144 巻 2 号 p. 25-29
Road to development of the piezoresistive semiconductor pressure sensor is verified retroactively. There was a sixty year's history of the past. In this paper, it is explored the path of technological innovation in semiconductor pressure sensors, which are the basis of pressure sensors that are indispensable for automobiles today.
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