Analog Integrated Circuit for Micro-Gyro Interface Realized by Multi-chip Service in Japan

Abstract

This paper deals with an analog integrated circuit for micro-machined gyroscopes with capacitive output. The Integrated ciorcuit was fabricated as a part of the first project from the “Micromachining Multi-Chip Service Cooperative Research Committee” organized by The Institute of Electrical Engineers Japan. This multi-chip service project offers a master slice chip with an equivalent of 9 blocks of operational amplifier circuits. Our integrated circuit includes a modulator, demodulator and synchronous rectifier for detecting small changes in the capacitance of a silicon gyroscope. In the paper, the experimental results of fabricated samples will be described.