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- The Journal of the Institute of Electrical Engineers of Japan
Volume 118, Issue 10
Displaying 1-7 of 7 articles from this issue
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Jae-joon Choi, Kazuyuki Minami, Masayoshi Esashi1998 Volume 118 Issue 10 Pages 437-443
Published: October 01, 1998
Released on J-STAGE: December 19, 2008
JOURNAL FREE ACCESSA rotating vibration type silicon angular rate sensor was fabricated by deep ICPRIE and XeF2 gas etching. Using these two etching methods, a sensor which has beams in the center of the thickness of its mass could be fabricated very precisely. This sensor has a glass-silicon-glass structure and its resonator is excited electrostatically and the vibration caused by the angular rate is measured capacitively. The angular rate was measured in a range between -250 to +250deg./sec. and measured sensitivity was 2.1fF/(deg./sec.).View full abstractDownload PDF (1664K) -
Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita1998 Volume 118 Issue 10 Pages 444-448
Published: October 01, 1998
Released on J-STAGE: December 19, 2008
JOURNAL FREE ACCESSWe propose a new method to develop three-dimensional micro systems by using hybrid assembling technique: IC or MEMS chips are patterned into connector structures on the fringes by anisotropic dry etching of silicon and orthogonally inserted into the slots in a micro base-chip to compose a miniaturized motherboard. Mechanical and electrical contact was completed by electroplating of copper. Small contact resistance (0.18Ω) and stray capacitance (50pF) were obtained. This technique relaxes the restriction due to the incompatibility between fabrication process of MEMS and that of integrated circuits, because those chips on the motherboard can be developed independently.View full abstractDownload PDF (3842K) -
Masahiko Kuroki, Takashi Kokubo, Naruhiko Mukai, Hidehiko Kuroda1998 Volume 118 Issue 10 Pages 449-454
Published: October 01, 1998
Released on J-STAGE: December 19, 2008
JOURNAL FREE ACCESSAnew technique to visualize transparent oil remotelyhasbeenpresented. Inherently a semiconductor-based oil sensor or a CCD-camera-based sensing device has been employed in a power plant. However, they can hardly recognize oil-leaked areas and issue a leak alarm immediately when monitoring transparent oil such as steam turbine oil and gas turbine oil. To overcome the restrictions, a pulsed fluorescence method, where a pulsed flash lamp is used for incident ultra violet ray in a standard fluorescence method, has been developed. For verification, an oil monitoring device based on the present technique has been developed. Some experiments to demonstrate performances of the present device have been carried out in an actual power plant. As a result, it has been shown that the present device works successfully.View full abstractDownload PDF (3033K) -
Yoichi YAMAMOTO, Kensuke FUKUMOTO, Keiji TANIGUCHI, Yutaka NAKANO, Hir ...1998 Volume 118 Issue 10 Pages 455-459
Published: October 01, 1998
Released on J-STAGE: December 19, 2008
JOURNAL FREE ACCESSWe investigate here the movement of toner particles placed between parallel electrodes using a high-speed camera with a microscope. The result obtained is as follows:
Toner particles are thrown up near the center of the gap between parallel electrodes by one shot motion of the lower electrode caused by the piezoelectric element. After that, some of voltage are applied across the electrodes. As a result, the following phenomena are observed: toner particles are lifted toward the upper electrode, they are balanced approximately near the center of two electrodes or they are fallen down to the lower one.View full abstractDownload PDF (3586K) -
Hiromi Ohno, Masao Saito1998 Volume 118 Issue 10 Pages 460-466
Published: October 01, 1998
Released on J-STAGE: December 19, 2008
JOURNAL FREE ACCESSThe measurement of the blood flow velocity is important in assessing the cardiac functions. There are two methods to measure the blood-flow velocity by ultrasound, which are the Doppler frequency shift and the framewise cross-correlation methods. We discuss the accuracy of measurement by the framewise cross-correlation. The method is simulated on a computer. The method includes several parameters that affect the accuracy of the measurement, such as the size of ROI, the pulse repetition time, the transmitted waveform, the velocity distribution of red-blood cells, the amplitude distribution inside the beam and the hematocrit. The effects of those parameters are examined by simulating the actual measuring procedure. The optimal values of the parameters indicated by the simulation will be used in the design of the measuring system.View full abstractDownload PDF (1475K) -
Takehiro Koyama, Yongchang Zhu, Tatsuo Takada, Yoshihiro Murooka, Tosh ...1998 Volume 118 Issue 10 Pages 467-474
Published: October 01, 1998
Released on J-STAGE: December 19, 2008
JOURNAL FREE ACCESSA two-dimensional measurement method for a birefringence vector distribution differs from a point measurement not only in the two-dimensional system non-uniformity, but also in the system reliability. An optical phase pulsed modulation is employed to simplify the two-dimensional mathematical analysis. As a result, concepts are proposed of the system function, which characterizes the system non-uniformity resulting from the system components, and of the intrinsic function, which is related to the birefringent sample. The influence of the system non-uniformity on the two-dimensional measurement is eliminated by measurement of the intrinsic function while its two values allow the mathematical separation of the birefringence vector components. The effectiveness of the two-dimensional analysis is illustrated by the measurement of a birefringence vector distribution induced by an internal stress distribution in a PMMA plate due to the photo-elastic effect.View full abstractDownload PDF (4133K) -
Kazusuke Maenaka, Takayuki Fujita, Kazuto Okamoto, Muneo Maeda1998 Volume 118 Issue 10 Pages 475-482
Published: October 01, 1998
Released on J-STAGE: December 19, 2008
JOURNAL FREE ACCESSThis paper deals with an analog integrated circuit for micro-machined gyroscopes with capacitive output. The Integrated ciorcuit was fabricated as a part of the first project from the “Micromachining Multi-Chip Service Cooperative Research Committee” organized by The Institute of Electrical Engineers Japan. This multi-chip service project offers a master slice chip with an equivalent of 9 blocks of operational amplifier circuits. Our integrated circuit includes a modulator, demodulator and synchronous rectifier for detecting small changes in the capacitance of a silicon gyroscope. In the paper, the experimental results of fabricated samples will be described.View full abstractDownload PDF (4210K)
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