抄録
Thermal interaction between a micro-flow sensor and the air flow around it was investigated. At a higher flow velocity. the Navier-Stokes' equation, coupled with the heat-conduction equation of the sensor, was solved. The heat-transfer coefficient by the simulation was roughly equal to the one calculated from the forced convection heat transfer theory. At the zero flow velocity, the interaction between the sensor and the air was simulated by FEM. The heat energy from the sensor to the air was almost fixed at the heat conductivity of the air multiplied by the temperature gradient of the sensor from the silicon plate. At a lower air flow velocity, the thermal sensitivity of the sensor nearer to the silicon plate is limited.
