IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Microfabricated Chips for Capillary Electrophoresis on Quartz Glass Substrates
Takahiro NishimotoHirohisa AbeMasaki KanaiYoichi FujiyamaHiroaki NakanishiAkihiro Arai
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1999 Volume 119 Issue 10 Pages 476-481

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Abstract
Microchips for capillary electrophoresis have been fabricated in small size on quartz glass substrates. Microchannels with smooth sidewalls are etched by applying adopted etching condition. To fabricate quartz glass chips, we applied a novel bonding method with dilute hydrofluoric acid solution. Using fabricated microchips, we show that they permit to perform quantitative sample injection (several 10pl or less), effective separation (the number of theoretical plates is over 2, 500) and high speed analysis (_??_30 sec). In order to improve the detection sensotivity of UV absorbance method, we have developped the chips which have optical slit, and confirmed that the absorbance unit was improved about ten times.
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© The Institute of Electrical Engineers of Japan
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