Micro Capillary Array Chip For DNA Analysis Fabricated by Deep X-ray Lithography

Abstract

A concept of new micro capillary array chip for DNA analysis was proposed and it was fabricated by deep X-ray lithography technology. The chip was made of PMMA and it contains 20 micro channels with width of 50μm, depth of 100μm and space between channels of 10 to 50μm. As an technique to control an inclination angle of a micro channel side wall, a newly developed moving mask LIGA (M²LIGA) technology was proposed. The side wall inclination angle was successfully controlled between 90 to 70 degree by varying a diameter of a mask movement.