Mechanical properties of titanium thin films of 0.40μm thickness, microfabricated by magnetron sputtering, were measured by using a novel tensile machine. The test section of these specimens was 0.3mm in width and 1.4mm in length. The stress concentration factor at the fillets of the specimens was about 1.02, therefore, the designed shape of the specimens was suitable for uniaxial tensile tests. Tensile tests were conducted on specimens of 1.0 to 1.4mm gauge length in order to examine the effect of gauge length on the measurements of mechanical properties. Stress-strain diagrams of thin films were measured continuously in the atmosphere at room temperature. Specimens didn't neck down with almost no plastic deformation. Fractured specimens and measured stress-strain diagrams showed that the material had a low ductility. The experimental results indicated that measurements of Young's modulus and breaking elongation were independent of gauge length for our range of measurements.
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