電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Development of a Highly Sensitive Sensing Film of a Gas Sensor by Molecular Arrangement Control of Self-assembled Film
Seimei ShiratoriKazuki Kohno
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2001 年 121 巻 5 号 p. 261-265

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We have found that the spatially controlled LB films with polymer backbone were fit for a sensing film of the novel gas sensor using a quartz crystal microbalance with molecular sifter function and high durability. By the systematic optimization of the film fabrication condition such as polymer concentration, number of layers and the dipping conditions of LB films, the sensor sensitivity reached 70 to 100 times of the sensor response of the conventional QCM type gas sensor. The maximum sensor response showed 7000Hz frequency shift for the small hydrophilic gas molecules such as α-pinene. The QCM type sensor using the newly developed highly organized sensing film would be promising as a high sensitivity gas sensor because of its high S/N characteristics.
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© The Institute of Electrical Engineers of Japan
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