電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
多重内部反射赤外分光法による環境計測
高柳 史一遠藤 礼暁丸尾 和幸吉田 春雄庭野 道夫
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2001 年 121 巻 6 号 p. 331-336

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Environmental sensor which can detect and identify environmental pollution in real time is needed. It could be made by using Multiple internal reflection FTIR(MIR-FTIR) because of its short measurement time and high sensitivity. We chose GaAs which transmits large band lights which many molecule vibration exist in. It is possible to identify the gas which exists in the atmosphere around the crystal by FTIR spectrums. It is also possible to measure concentration of the gas in the atmosphere by measuring peak intensity of it. The result of reproducibility experiment will be reported finally.
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