抄録
Inkjet head with four micropumps for DNA chip is described. The micropump injects each nucleotides alternately on the substrate. Electrostatic microactuator which consists of a thin Si diaphragm and Si electrode with a narrow gap is used for driving the pump. The inkjet head doesn't have an increasing temperature not to heating the nozzles directly and then the nucleotides don't have damages. The typical driving voltage is 150V and the head achieved an uniform drop ejection at a driving frequency of 1kHz.
