抄録
Development of uncooled infrared camera has been accalerated to be improve its operating performance and to promote downsizing by production technology of integrated ciurcuit. It is the first time in Japan that the uncooled camera is realized, which employs 256×256 uncooled bolomater sensor elements. Vanadium Oxide material is selected for the uncooled bolometer sensor whose element size is 50μm×50μm and formed on the diaphragm bridge structure. As a result, it has a NETD of 0.2K with an f/1.0 lens at 30 frames per second.
