Realization and Application of the Base Plate Jerk Feedback in a Pneumatic Positioning Stage

抄録

In this study a pneumatic positioning stage is considered, which is mounted on the base plate. The base plate is supported by the coil-type spring isolators. The stage is moved by the driving force and the reaction force causes the vibration of the base plate with its natural frequency, affecting the stage to fluctuate in the opposite direction, which degrades the performance of positioning. To reduce the effect of the reaction force and improve the positioning time, the base plate jerk feedback is proposed. This feedback was first realized using an external force exerted to the base plate and then employed for the real condition of positioning. In both cases good experimental results were obtained, which are explained in the remainder of this literature.