Extreme ultraviolet radiations from a laser-produced-plasma using solid metal targets

Matsuura Yuta; Nagamine Satori; Kaku Masanori; Kubodera Shoichi

doi:10.11527/jceeek.2010.0.660.0

平成22年度電気関係学会九州支部連合大会（第63回連合大会）講演論文集

セッションID: 12-2P-07

DOI https://doi.org/10.11527/jceeek.2010.0.660.0

会議情報

主催: 電気関係学会九州支部連合会

Extreme ultraviolet radiations from a laser-produced-plasma using solid metal targets

Matsuura Yuta, Nagamine Satori, Kaku Masanori, Kubodera Shoichi

著者情報

キーワード: 国際セッション（光および量子エレクトロニクス）

会議録・要旨集フリー

詳細

抄録

We have been developing a photon-stimulated desorption spectrometer (PSDS), where adsorbed chemicals on a surface are desorbed by high energy photons. We are developing continuous extreme ultraviolet (EUV) emissions from a laser-produced plasma (LPP) for high energy photons. Emission characteristics and plasma parameters of the LPP EUV source were investigated.

責任著者(Corresponding author)

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