水晶MEMS傾斜角センサにおける櫛歯電極間静電容量エッジ効果の影響評価

抄録

In this paper, we report simulation and experimental results of capacitance edge effect on the comb electrodes of the quartz MEMS tilt sensor. The principle of the quartz tilt sensor is that the displacement of the moving element corresponding a tilt angle change is detected as capacitance change of comb electrode. To investigate the performance of the tilt sensor, we need to evaluate the sensitivity of the tilt sensor with and without the edge effect.