顕微鏡とレーザー投影に基づく高感度三次元計測システムの開発

抄録

As the measurement demand for minute object is growing, some 3D methods have been proposed, Shape-from-focus method is widely used. However, this method is insensitive in depth direction. In order to solve this problem, we developed the 3D image measurement system based on laser projection and microscope. First, capture full-illumination image and laser image of the object. Then, calculate moving distance between two images and extract the centerline of laser. Next, we can combine the laser scan result into one image by suing moving distance. Finally, we achieved high sensitivity measurement.