Journal of the Ceramic Society of Japan
Online ISSN : 1348-6535
Print ISSN : 1882-0743
ISSN-L : 1348-6535
Papers
Micromachining of glass by using a Nd:YAG (532 nm) laser for the optical device
T. H. KIMK. H. LEEY. J. JUNGY. S. KIMH. J. CHINB. K. RYUH. O. KANGS. H. LEE
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2008 年 116 巻 1350 号 p. 309-312

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Suitable types of glass for laser micromachining using a Nd:YAG laser have been developed. The composition of these types of glass is (70-x)SiO2-xB2O3•10Na2O•10CaO (x=0, 10, 15, 20, 25, 30). These types of glass contain the Co ions found in a glass matrix (adding to the mother glass). After machining with the 2nd harmonic beams of a pulsed Nd:YAG laser, the bump in the glass host, the pit at the bump in the glass host and the sole pit were all formed. This report was conducted for researching the relationship between bonding intensity of glass and thermo-mechanical properties, and for finding out the possibility of the fabrication of optical device. The maximum height of the bump in the glass was 16 μm and had a radius was 262.3 μm. We found that the Co ions acted as sensitizers in the laser machining of the glass and this process can be used for optical device fabrication process.
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© 2008 The Ceramic Society of Japan
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