Transactions of The Japan Institute of Electronics Packaging
Online ISSN : 1884-8028
Print ISSN : 1883-3365
Technical Papers
Fabrication of a Dihedral Corner Reflector Array for a Floating Image Manufactured by X-ray Lithography Using Synchrotron Radiation
Akinobu YamaguchiSatoshi MaekawaTomohisa YamaneIkuo OkadaYuichi Utsumi
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2015 Volume 8 Issue 1 Pages 23-28


The development of a new imaging optic which can produce a floating image has attracted much attention. One candidate for such an optic is the dihedral corner reflector array (DCRA). A DCRA consists of numerous micro-mirrors placed perpendicular to the surface of a substrate. The micro-mirror array is implemented by the inner walls of minute square holes or by the side of a minute square pillar. The primordial is based on two reflections by a pair of adjacent mutually perpendicular mirrors, i.e. a dihedral corner reflector. Although the principle of operation is based on reflection by mirrors, the device is also transmissive and deflects light. Thus, the primordial of DCRA is not particularly complicated. However, it is too difficult to fabricate the DCRA by typical machining processes, because high aspect ratio micromachining and high mirror accuracy are required. Therefore, in this study, we fabricate the device by deep X-ray lithography using synchrotron radiation. We demonstrate floating image projection using the fabricated DCRA.

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© 2015 The Japan Institute of Electronics Packaging
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